Gigaphoton Begins Mass Production and Shipment of the ArFi GT66A Light…
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2020.12.16 11:50
GIGAPHOTON Inc. (Head office: Oyama, Tochigi; President & CEO: Katsumi Uranaka), a manufacturer of light sources for semiconductor lithography, has announced the start of mass production and shipment of the ArF immersion “GT66A” light source using new technologies for state-of-the-art semiconductor lithography manufacturing.
Leading-edge device manufacturing has now begun with the process development of 3 nm nodes for logic devices and mass production of 1 Znm DRAM. For these ultra-fine d...